Fast Steering Mirror (FSM)

Features of Fast steering mirror (FSM)

The Fast-Steering Mirror (FSM) incorporates a mirror mounted to a flexure support system that is tilted to direct a laser beam or other light source.  A set of voice coil actuators or eddy current sensors are used to provide directional motion for complete precision and low jitter functionality.

The system offers either open-loop and closed-loop operation.  For closed-loop operation, integrated high-speed precision sensors are used to provide a complete feedback control system.  With its modular design, the FSM allows increased flexibility in mirror substrate choice, aperture size, degrees of tilt and control electronics to meet any mission requirements.

Bena Optics fast steering mirrors are standardly polished to interferometric control reflective-wavefront-error of e.g. λ/8 PV @632,8nm.

• High stiffness

• Ultra-light weight

• Low moment of inertia

• High resonant frequency

• Thermal stability

• Low dynamic flatness PV

• Nontoxic (Beryllium replacement)

The fast-steering mirror is an important part of the photoelectric precision tracking system, which is used to precisely control the beam direction. Fast mirror response speed, high control accuracy. It can be used to correct the tilt error in the optical path, can also be used to stabilize the direction of the beam, and can also be used in the fast tracking system. The fast mirror controls the fast and high frequency rotation of the mirror under the action of the driving element to realize the high-speed accurate pointing, stabilization and tracking of the beam.

Applications for Fast steering mirror(FSM)

l  Geodetic survey

l  Airborne and space scanning systems

l  High power laser material processing UV-IR, such as machining, marking, additive manufacturing

l  Metrology and wafer inspection

l  Biological/Medical ophthalmology

l  Ultra-high speed scanning camera for positioning applications

l  Sensing applications LiDAR