Overview of Micro Mirrors
Like ordinary optical mirrors, micro mirrors are characterized by their small size, typically around Ø2mm. These mirrors can also be coated with various metal and dielectric thin films. They are primarily used in specialized applications such as endoscopes and radar cameras.
Features of Micro Mirrors
Small size: The size of the optical micromirror is usually around Ø2mm, or even smaller. This allows them to be integrated into very compact systems.
High precision: Due to the use of advanced manufacturing technology, optical micromirrors have extremely high surface smoothness and reflection accuracy.
Tunability: Some optical micromirrors can be adjusted by electrical signals to change their Angle or shape to achieve dynamic optical control.
Multiple coatings: Optical micromirrors can be coated with a variety of metal and dielectric films to enhance their reflectivity, durability and optical performance at specific wavelengths.
High reflectivity: With proper coating treatment, optical micromirrors can achieve very high reflectivity, suitable for efficient optical systems.
Specifications of Micro Mirrors
| Specifications | Commercial spec. | High precision spec. |
| Material | UV glass （quartz, fused silica） | |
| VIS glass （Schott, CDGM, HOYA，etc.) | ||
| Dimension | 0.5mm~5mm | |
| Dimension tolerance | ±0.1mm | ±0.05mm |
| Focal length tolerance | ±2% | ±1% |
| Surface quality | 60/40 | 40/20 |
| Centration | < 3 arc min | <1arc min |
| Surface figure | 3λ | 2λ |
| Surface irregularity | 1/4λ | 1/10λ |
| Clear aperture | >85% of dim | >90% of dim |
| Bevel | <0.2mm x 45deg | <0.1mm x 45deg |
| Coating | Up on clients’ request | |
Applications of Micro Mirrors
Medical endoscopes: In endoscopes, optical microscopes are used to guide and reflect light, allowing doctors to look inside the body through small incisions. This application requires micromirrors with high reflectivity and small size to operate in tight Spaces.
Laser scanning system: Optical micromirrors are used in laser scanning systems to scan the laser beam by quickly adjusting the Angle of the mirror to achieve high-precision image capture and processing.
Optical communication: In optical communication systems, optical micromirrors are used to route and switch optical signals, providing efficient and low-loss optical path control.
Projection display: In digital light processing (DLP) projectors, millions of micromirrors are used to control the reflection of light, forming high-resolution images.
Adaptive optics: In astronomy and microscopy, optical micromirrors are used in adaptive optical systems to compensate for aberrations in optical systems and improve image quality by adjusting the mirror shape in real time.
Radar camera: In radar imaging systems, optical micromirrors are used to guide and focus radar beams to achieve high-resolution target detection and imaging.
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